PNG  IHDR>SPLTE }џͤי֣׶‚ΠͪE'cھݚp"ʖ9ϖßMdCVG\AɌùfyp.˪X#>cae pHYs+IDAThkw6 MN,(uݥ[]N/{Ocْ:jtJzwg.Т:B*pű ⺋ZbTct2Gu{)iMKx1=赆-5%YGI鹈\L_i~q[$gnݿfG}_X8*{ۧcFVn--̓h 3@>ͥc+59 MvXJ+a#NxU`QAHcVX ҵn+`?=e cceolbłhٶJN\YI.tLz`J k$nh)ijByuOD׽}6J;L#. Lkp; eоj^ƊbcY>BSt0,KbI\k9c'[v-;~ !\};u[<52t ꓿=/ fš̱ e(I% !Vƒ@fXMqz4qxOl : A9% =ӡ{jlUK2ĹjeFrk.'(d9<~TPRckkI摺I4"5yԸyb6FY]b5_Ŭ"㞶 Ixb+{R2 ` OF ax*?7O`*Mpf8U? $1oThhkr|8<njriEm*m%DyIMepbn/ŅSϦ 4X+\fᅐ/z-c]\ALjRz]/.dYm[gJnS. ƺ1բ&ҖU];Pk( ˪2XE7Ԇ8g*lFlj}4.fq?bcÿ=V]pч zemax;M3a+`)cL#bujۈt1K%GIENDB`